If the number of "hits" in a given distance is proportional to the number density I of those still "unhit", then...
From this follows the law of exponential decay for an un-interacted beam traveling distance z in a target sample...
Thus, the probability of no interaction is Po = I/Io = e-z/τ, and the probability of at least one interaction is P1+ = 1-Po = 1 - e-z/τ. When (and only when) z is much less than τ, this interaction probability becomes P1+ ~ Qz = z/τ.
For example, if the inelastic mean free path for 300kV electrons in silicon is 200nm, the fraction of electrons which have lost energy after going through a 10nm specimen is P1+ = 1-e-10/200 ~ 10/200 = .05.
In place of cross-section per unit length Q, folks who consider scattering a lot often define the cross-section per atom σ = Q/η (e.g. in cm2 or barns), where η is the number density of atoms in the target (e.g. in atoms/cc).
For example, since the number density of atoms in silicon (and most solids) is η ~ 5×1022 [atoms/cc], for 300kV electrons the inelastic scattering cross-section per silicon atom is therefore σ ~ (1/200nm)/η = 0.01 Å2.
In place of thickness mean-free-path τ, since mass and cross-section are sometimes proportional, nuclear physicists oft use the density mean-free-path τρ = τ ρ (e.g. in g/cm2), where ρ is the mass density of the target (e.g. in g/cc).
For example, since the mass density of silicon is around 2.5[g/cc], the density mean-free-path for 300kV electrons in silicon (and other solids as well) is τρ ~ 50[μg/cm2].
UM-StL Physics and Astronomy, P. Fraundorf (c) 2000.